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. 2021 Aug 17;21(16):5513. doi: 10.3390/s21165513

Table 3.

Material properties used in the simulation of both devices A and B [4,8,16,23,39,40].

Parameter Si SiO2 Pt Mo Au
Young’s Modulus [GPa] 170 70 168 312 70
Poisson’s Ratio 0.28 0.17 0.38 0.31 0.44
Density [kg/m3] 2329 2200 21,450 10,200 19,300
Relative Permittivity 11.7 4.2 - - -