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Modeling parameters.
| Technological Parameters | |||||
| Number of laser pulses | 36,000 | ||||
| Laser pulse repetition rate | 10 Hz | ||||
| Substrate diameter | 300 mm | ||||
| Target diameter | 50 mm | ||||
| Target-substrate distance | 75 mm | ||||
| Target rotation speed | 10 °/s | ||||
| Substrate rotation speed | 0.1 °/s | ||||
| Scanning System Parameters (default parameters are highlighted) | |||||
| Origin | 0 | 10 | 25 | 40 | 50 |
| Upper Limit | 25 | 40 | 50 | ||
| Lower Limit | 0 | 10 | 25 | ||
| Maximum Velocity | 5 | 10 | 20 | ||
| Minimum Velocity | 0.1 | 1 | 5 | ||
| Lower Coefficient | 1 | 5 | 15 | 30 | 60 |
| Upper Coefficient | |||||
