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. 2021 Mar 2;7:14. doi: 10.1038/s41378-020-00237-8

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© The Author(s) 2021

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 6 — a Absorption spectra of the TiN absorber before (black line) and after (red line) annealing at the temperature of 600 ^∘C, and SEM images. b Photographs captured by an infrared camera, of (left) ring-shaped TiN absorber and (right) MIM structure. The fabricated absorbers are attached to slide glass and illuminated using a xenon lamp. Temperature of the TiN absorber increases over 80 ^∘C due to its near-perfect absorption, whereas MIM structure has much lower temperature