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. 2021 Aug 13;7:61. doi: 10.1038/s41378-021-00288-5

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© The Author(s) 2021

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 3 — a Simulated deformation profile for the transverse (2, 0) mode excited in a circular diaphragm (diameter of 230 μm) using COMSOL Multiphysics 5.5, which shows the distribution of the absolute (i.e., vector sum or modulus) displacement. b Micrograph showing the top side of the fabricated circular diaphragm resonator and transducer electrode layout with the transduction ports labeled based on differential driving and sensing. c Side view schematic of the TPoS circular diaphragm resonator showing the constituent thin film layers and through-wafer back cavity.