Table 3.

Fitting parameters of the charge decay process at high humidity (99% RH)

	#1 COC Spin	#3 COC Spray × 12	#4 COC Spray × 12 + 200 μL PS	#5 COC Spray × 12 + 400 μL PS
a1	0.6259	0.3974	0.3619	0.1149
b1	−6.3 × 10−3	−3.1 × 10−3	−6.7 × 10−3	−4.2 × 10−3
a2	0.3741	0.6025	0.6381	0.8851
b2	−3.62 × 10−5	−2.81 × 10−5	−2.92 × 10−5	−3.12 × 10−5
R2	0.9983	0.9994	0.9946	0.9868