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. 2021 Aug 17;7:64. doi: 10.1038/s41378-021-00286-7

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© The Author(s) 2021

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 1 — a Crossed waveguides with different widths w_l. b Crossed waveguides with a designed width of 200 nm. c Magnified view of waveguides (b) and crossing area defining the cross resolution. d, e Waveguides with different feature sizes and levels of complexity. f Structures with curved features and different feature sizes.