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. 2020 Feb 10;6:1. doi: 10.1038/s41378-019-0121-y

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© The Author(s) 2020

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 1 — a Mechanism of actuation using Chevron-peg electrothermal microactuators—6 distinct phases in the forward (downward) actuation toward a neuron by one step (6.5 μm) using the 4 different electrothermal microactuators (1—Forward drive, 2—Disengage reverse, 3—Reverse drive, 4—Disengage forward). Their corresponding voltage waveforms are shown below. The time required to move one step of 6.5 μm can be as small as 6 ms before we see decreases in reliability. b Micrograph of the electrothermal microactuators integrated with the polysilicon microelectrode to enable cell penetration. c Integrated glass–polysilicon microelectrode for intracellular recording. d The integrated MEMS-based intracellular recording system.