Table 1.

Parameters of materials used for our sensor

	Materials	Density (kg/m3)	Young’s modulus (GPa)	Size (mm)
Piezoelectric beam	PZT	7.8 × 103	66	3 × 1 × 0.127
Mechanical beam	Aluminum	2.7 × 103	69	3 × 12 × 0.38
Proof mass	Aluminum	2.7 × 103	69	20 × 12 × 1.5