Fig. 1. Schematic representation of the process flow for the dynamic 3D MEA fabrication with µserpentines and details of the µserpentines.

a Schematic of the process flow. (i) 3D printed µserpentine with out-of-plane electrode structures. (ii) Initial fabrication steps, including the UV laser micromachining of the Kapton® substrate and the IR laser micromachining of the steel deposition mask with associated sputter metallization of the Au traces. (iii) Assembly of the full device, where a metallized µserpentine is IR laser micromachined selectively to isolate the electrodes and then is placed on the Kapton package and insulated with PDMS. (iv) Schematic of the fully assembled device. b Schematic of a µserpentine for illustration of the geometric parameters. (i) µserpentine denoting a singular “S” subunit and highlighting (ii) illustrates the various geometric parameters and reference orientation.