Fig. 1. Optimization process and full parameterized AMPACC model and freeform geometries.

a Schematic view of the parameterized AMPACC model comprising a a proof mass, b microlevers, c output comb fingers, and d anchors. The direction of motion is along the y-axis. b Generic process flow of the proposed optimization system. c Freeform beam model in MEMS+²². d The orthogonal design of the pivot-input beam from ref. ²⁰ is changed into freeform beam structures defined by parameters noted in red and blue in Table 1