Fig. 2. Thermal removal of the polymer and its effect on the capacitive response of the sensor.

a Schematic explanation of the thermal annealing principle applied to reduce the PMMA thickness $h\left(t\right)$. b Change in capacitance of a single chip as a function of measurement in response to time-dependent pressure changes, $\mathrm{\Delta }P$, for samples that have been annealed for different times $t$ (line colors correspond to the color of the corresponding annealing times indicated in the legend). The gas pressure is changed at a rate of $175.4$ mbar s⁻¹. c Responsivity and noise floor extracted from the data in b, calculated using Eq. (1)