Table 2.

Details of the fitting parameters for Sn3d, O1s and Zn2p core level XPS spectra of zinc tin oxide thinfilms. A₁ and A₂ represent integrated peak areas of the peak 1 and peak 2, respectively.

Sample	Sn3d5/2 (eV)	O1s			Zn2p3/2
		Peak 1 (eV)	Peak 2 (eV)	$\frac{{\mathrm{A}}_2}{{\mathrm{A}}_1+{\mathrm{A}}_2}$	Peak 1 (eV)	Peak 2 (eV)	$\frac{{\mathrm{A}}_2}{{\mathrm{A}}_1+{\mathrm{A}}_2}$
33ZTO		530.0	531.42	0.396	1021.37	1021.77	0.105
50ZTO	486.20	529.96	531.40	0.325	1021.78	1022.22	0.472
Identity	Sn–O	O2−	VO	–	Zn–O	Zni	–