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. 2021 Sep 16;14(18):5348. doi: 10.3390/ma14185348

Figure 8.

Figure 8

(a) Schematic cross-section view of the effect of the ISP compliant substrate on the SFs. Silicon and silicon carbide are drawn as black and white regions. Blue lines are SFs. (b) Cross-view SEM image of the ISP structure. (c) Plane-view SEM image. The four (111) planes of the pyramid are shown, as well as the (001) region among the two pyramids (adapted from Reference [17]).