Table 1.

Simulation parameters for the design of SPAS.

Structural Parameter	Value/mm	Material Parameter	Value
R1, R2	7.5, 1.5	E	2.07 × 1011 Pa
r1, r2	4.5, 0.5	μ	0.29
$H$	0.01	Pressure in cavity 2	Value
h	0.1	p 0	1.01 × 105 Pa