Table 1.

The materials parameters of ME material components.

Material	s11 (10−12 m2/N)	s12 (10−12 m2/N)	s13 (10−12 m2/N)	s33 (10−12 m2/N)	q11 (10−12 m/A)	q12 (10−12 m/A)	d31 (10−12 m/V)	d33 (10−12 m/V)	ε33/ε0 μ/μ0	ρ (g/cm3)
PZT	15.3	−5	−7.22	17.3	–	–	−175	400	1750	7.75
PMN-PT	23	−8.3			–	–	−600		4100	8.1
AlN	2.9	−0.93	−0.5	2.8	–	–	−1.92	4.96	8.5	3.255
Terfenol-D	33.3	−10			15,707	4730	–	–	5	9.25
Ni	20	−7			−4140	1200	–	–	300	8.902
Metglas	10	−4			11,000	−2000	–	–	105	7.6