Table 2.

Geometrical and mechanical parameters used in the COMSOL simulation.

Parameters	Value
$t_1$, $t_2$ ($\mathsf{\mu }$m)	40
$w_1$, $w_2$ ($\mathsf{\mu }$m)	50
$w_b$ ($\mathsf{\mu }$m)	50
$t_b$ ($\mathsf{\mu }$m)	350
$t_z$ ($\mathsf{\mu }$m)	575
$t_y$ ($\mathsf{\mu }$m)	525
Poisson’s Ratio, $\nu$	0.27
Piezoresistive Coefficient, $\pi$ (${\left[TPa\right]}^{-1}$)	718
Young Modulus, E (GPa)	170
No load Resistivity, ${\rho }_0$ ($\Omega$mm)	0.25