| HF CVD | hot filament chemical vapor deposition |
| M-VRH | Mott variable range hopping |
| ES-VRH | Efrost-Shklovskii variable range hopping |
| I-V-T | current voltage characteristics versus temperature |
| RT | room temperature |
| GB | grain boundary |
| N(E) | density of states near Fermi energy |
| grain boundary’s potential | |
| DF | diamond film |
| SEM | scanning electron microscopy |
| FWHW | full width at half maximum |
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