Table 1.
Overlapping-layer gate characteristics.
| Layer index | Gate name | Gate color | Gate width (nm) | Gate height (nm) |
|---|---|---|---|---|
| 1 |
B11–12, B12–13… BR1–11, BR2–13… |
Blue | 50 | 15 |
| 2 | P11, P12… | Red | 90 | 25 |
| 3 | B12–22, B21–22… | Yellow | 60 | 40 |
| 4 | P22 | Magenta | 70 | 60 |
Overlapping-layer gate characteristics.
| Layer index | Gate name | Gate color | Gate width (nm) | Gate height (nm) |
|---|---|---|---|---|
| 1 |
B11–12, B12–13… BR1–11, BR2–13… |
Blue | 50 | 15 |
| 2 | P11, P12… | Red | 90 | 25 |
| 3 | B12–22, B21–22… | Yellow | 60 | 40 |
| 4 | P22 | Magenta | 70 | 60 |