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. 2021 Sep 30;11:19406. doi: 10.1038/s41598-021-98212-4

Table 1.

Overlapping-layer gate characteristics.

Layer index Gate name Gate color Gate width (nm) Gate height (nm)
1

B11–12, B12–13

BR1–11, BR2–13

Blue 50 15
2 P11, P12 Red 90 25
3 B12–22, B21–22 Yellow 60 40
4 P22 Magenta 70 60