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. Author manuscript; available in PMC: 2022 Jun 1.
Published in final edited form as: Adv Mater Technol. 2021 May 3;6(6):2100149. doi: 10.1002/admt.202100149

Table 2.

Atomic composition of the polyimide surface after various processing steps obtained using XPS survey scans. Data shown include the arithmetic average (+/− standard deviation), n = 3.

Process step Carbon (%) Oxygen (%) Nitrogen (%) Fluorine (%) Silicon (%)
As-cured 75.4 (2.1) 18.1 (1.4) 6.4 (2.3) 0.0 (0.0) 0.0 (0.0)
O2-RIE activated 67.7 (2.5) 25.8 (2.2) 6.4 (2.4) 0.0 (0.0) 0.0 (0.0)
SF6-RIE exposed 50.8 (1.9) 11.0 (2.7) 5.0 (1.2) 33.3 (3.4) 0.0 (0.0)
APTES silanized 49.1 (3.9) 34.1 (3.2) 6.8 (2.2) 0.0 (0.0) 10.0 (1.1)