a) Influence of Li concentration of Li1+
x
Al
x
Ti2‐
x
(PO4)3 showing the trend of increase in ionic conductivity with increase in Li concentration (Jimenez,[
135
] Hupfer,[
136
] Takahashi,[
137
] Pogosova,[
138
] Li,[
74
] Illbeigi,[
139
] Kotobuki[
140
]), b) structural evolution of Li1.3Al0.3Ti1.7(PO4)3 films which were deposited using an rf‐PVD at different substrate temperatures, c) morphologies of the LATP thin films deposited at different temperatures: c‐1) 25 °C, c‐2) 100 °C, c‐3) 200 °C and c‐4) 300 °C. b,c) Reproduced withpermission.[
141
] Copyright2011, Elsevier. d) Ionic conductivities of NASICON‐structured amorphous thin film electrolytes deposited at different temperatures (Chen (Li1.3Al0.3Ti1.7(PO4)3; rf‐sputtering),[
141
] Wu (Li‐Ti‐Si‐P‐O‐N; rf‐sputtering),[
142
] Ling (Li1.3Al0.3Ti1.7(PO4)3; rf‐sputtering),[
143
] Zhang (Li1.4Si0.4Ti1.6(PO4)3; rf‐sputtering),[
144
] Peng (Li1.3Al0.3Ti1.7(PO4)3; hydrothermal),[
145
] Liang (Li1‐
x
Ti2‐
x
Ga
x
(PO4)3; hydrothermal),[
146
] Inada (Li1.5Al0.5GE1.5(PO4)3; aerosol)[
324
]).