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. Author manuscript; available in PMC: 2021 Oct 13.
Published in final edited form as: Lab Chip. 2018 Sep 26;18(19):3037–3050. doi: 10.1039/c8lc00156a

Fig. 1.

Fig. 1

(a) CMOS quad-modality cellular interfacing array. The device features extracellular potential recording, cellular impedance measurement, static and dynamic optical recordings, and biphasic current stimulation. (b) Fully packaged quad-modality array chip. (c) The zoomed-in view of the packaged array. The chip is encapsulated by biocompatible materials such as PDMS and medical epoxy with the sensor area exposed for cell culture and cellular interfacing. (d) Each multi-modality pixel contains one 28 μm × 28 μm electrode and four 12 μm ×12 μm photodiodes and in-pixel front-end circuitry. (e) The side view of CMOS quad-modality cellular interfacing array.