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. 2021 Oct 14;12:6002. doi: 10.1038/s41467-021-26169-z

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© The Author(s) 2021

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 4 — a Photo of a commercial white light interferometer (Zygo NewView 9000) for surface profile measurement. b Optical setup for surface profile measurement using the proposed wavefront sensor where f is the focal length of the lens. c Surface profile of a PMMA polymer on a microscope slide measured with a WLI. d Same sample as in c measured with the proposed wavefront sensor. e Close-up view of the cropped region in d where the slope of the surface is represented with arrows indicating projected vector components. f PMMA polymer surface measured with a WLI equipped with a 10× objective lens. g Same sample as in f measured with our wavefront sensor equipped a 10× objective lens. h Red arrows indicate the region with steep slope where WLI fails to report the height.