Table 2.

Summary of the performed tests. Time refers to the total time which the process lasted.

Target	Pellet Mass/Thickness	Irradiation Parameters	Module	Vial Material	Process Parameters
NatY on Nb	0.0758 g 150 μm	12.5 MeV	Trasis	PEEK	2 mL HCl 2 M
		10 µA			RT 1
		5 min			Time 1 h
NatCr on Au/Cu	0.02 g 400 μm	16 MeV	E&Z	Borosilicate glass	3 mL HCl 8 M
		10 µA			Heating up to 70 °C
		15 min			Time 1 h
NatMo on Au/Cu	0.02 g 280 μm	19 MeV	E&Z	Borosilicate glass	1.5 mL (×3 times) H2O2 30%
		1 µA			Heating up to 90 °C
		2 min			Time 30 min

¹ Room temperature.