Figure 1.
Model of a single-axis, comb-type capacitive micro accelerometer. (a) Physical model of the accelerometer, (b) mechanical model of the accelerometer, (c) process flow of the accelerometer.
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.