Table 2.

The lattice and thermal mismatch of Si, SiC, Sapphire, AlN, and GaN.

Mismatch	Si	SiC	Sapphire	AlN	GaN
Crystal Structure	FCC	HCP	HCP	HCP	HCP
Lattice Constant (Å)	5.43	3.08	4.758	3.112	3.189
Lattice Mismatch (%)	−16.9	3.5	16.08	2.4	–
Thermal Expansion (10−6 K)	3.59	4.3	7.3	4.15	5.59
Thermal Mismatch (%)	55	30	−23	34	–