Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
Device characteristic of different Boron doped level in handle wafer.
| Sample | A | B |
|---|---|---|
| Dope-level | Light doped | Heavy doped |
| Doping concentration (atoms-cm−3) |
1.35 × 1015~1.49 × 1016 | 5.95 × 1019~1.26 × 1020 |
| Bowing (μm) | −258 | 6.7 |
| FWHM (arcsec) (1 0 2) | 1484 | 1188 |
