Table 1.
parameter | description | value |
---|---|---|
E | energy | 300 keV |
Δf | defocus | 2.5 µm |
Cs | spherical aberration | 2.7 mm |
Cc | chromatic aberration | 2.7 mm |
ΔI/I | current spread | 0.33 ppm |
ΔV/V | voltage spread | 0.80 ppm |
ΔE | energy spread | 0.8 eV |
θc | source spread | 0.1 mrad |
dpx | pixel size | 1 Å |
ts | multislice z-slice thickness | 5 Å |
potential approximation | Lobato et al. [42] | |
SE | beam damage sensitivity coefficient | 0.022 A2/e− |