TABLE I.

Comparison Table of State-of-the-Art Silicon-Based Biosensors

	Modality	Pixel Size (μm2)	Number of Pixels	Field of View (mm2)	On-Chip Cell Assay	Measured Cellular Phenotype	Tech (nm)
This work	Potential Recording, Impedance Sensing, Optical Detection, Current Stimulation	58 × 58	1024	1.85 × 1.85	Rat CMs	Extracellular Potential, Impedance/Optical Imaging, Cardiac Muscle Contraction/Relaxation, Stimulation	CMOS 130
[11]	Magnetic Movement Tracking	180 × 180	64	1.2 × 1.2	Cardiac Progenitors	Cardiac Muscle Contraction/Relaxation	CMOS 65
[16]	Potential Recording	7.5 × 7.5	16k	1 × 1	Snail Neurons	Extracellular Potential	CMOS 500
[17]	Potential Recording, Current Stimulation	17.5 × 17.5	26k	3.85 × 2.1	Rat Cortical Neurons	Extracellular Potential	CMOS 350
[18]	Impedance Sensing	90 × 90	100	1 × 1	DNA, Protein	DNA Hybridization, Protein Detection	CMOS 350
[21]	PH Sensing	10.2 × 10.2	65k	2.87 × 2.87	Hexokinase, Glucose	Glucose Concentration	CMOS 350
[22]	Optical Detection, PH Sensing	10 × 10	4096	0.64 × 0.64	45 μm Microbeads	N.A	CMOS 180
[29]	Fluorescence	250 × 250	56	3 × 3	DNA Molecule	DNA Hybridization	CMOS 350
[43]	Potential Recording, Impedance Sensing, Optical Detection	80 × 100	144	1.5 × 1.68	CMs, Neurons, Cancer	Extracellular Potential, Impedance/Optical Imaging, Bioluminescent	CMOS 130
[64]	Potential Recording, Impedance Sensing, Stimulation, Neurotransmitter Detection	13.5 × 1.35	59,760	4.48 × 2.43	Rat Cortical Neurons	Extracellular Potential, Stimulation	CMOS 180