Table 4.

Parameters used in the crystallization process of a-Si films, and the crystalline fraction and grain size calculated in the crystallized samples.

Code Sample	Irradiance (W/cm2)	Scan Speed (nm/min)	${\mathit{X}}_{\mathit{C}}(\%)$	Grain Size (nm)
A 1	950	400	84	50
A 1	1220	600	84	71
B 2	1385	1000	91	70
B 2	1630	1000	96	2450