Table 4.

The values of f, Q factor, $E_f$, ${\overline{F}}_z$, (${\overline{F}}_y)$, and R parameters shown in Fig. 5d,f for the hybrid aluminum-PDMS microchannel.

Resonance	f (MHz)	$\text{Q}$	Ef (Pa)	${\overline{\text{F}}}_{\text{z}}$ (pN)	${\overline{\text{F}}}_{\text{y}}$ (pN)	R
Two-displacement actuation model
1	0.908	698	2.75	23.3	9	2.6
2	1.051	178	0.2	2.28	1	2.28
3	1.083	423	0.54	6.1	0.48	12.6
One-displacement actuation model
1	0.909	505	1.12	3	2.5	1.2
2	0.926	926	0.37	2.6	1.1	2.2
3	1.053	181	0.11	1.2	0.4	2.8
4	1.068	1068	4.9	50.2	18.5	2.7
5	1.079	490	0.45	3.9	0.5	7.6