Table 8.

ANOVA table for the warpage optimization based on experimental results.

Source	DOF	SS	MS	F	p	Contribution
A	2	6.713	3.356	2.675	0.272	35.961
B	2	7.818	3.909	3.116	0.243	41.885
C	2	1.626	0.813	0.648	0.607	8.711
Error	2	2.509	1.255	-	-	13.443
Total	8	18.666	-	-	-	100