U11	U22	U33	U12	U13	U23
Cl1	0.0441 (4)	0.0620 (5)	0.0871 (6)	0.0058 (3)	−0.0173 (4)	−0.0221 (4)
O1	0.0728 (14)	0.0406 (10)	0.0539 (11)	0.0230 (9)	0.0045 (9)	−0.0123 (8)
O2	0.0988 (18)	0.0491 (12)	0.0566 (12)	0.0232 (12)	−0.0230 (12)	−0.0203 (10)
O3	0.0466 (10)	0.0364 (9)	0.0627 (12)	0.0073 (7)	−0.0089 (8)	−0.0114 (8)
O4	0.0359 (9)	0.0534 (11)	0.0668 (12)	0.0176 (8)	0.0023 (8)	−0.0033 (9)
N1	0.0352 (10)	0.0369 (10)	0.0432 (11)	0.0113 (8)	0.0030 (8)	−0.0016 (8)
N2	0.0537 (13)	0.0396 (11)	0.0455 (12)	0.0131 (9)	0.0075 (9)	−0.0053 (9)
C1	0.0492 (13)	0.0284 (10)	0.0344 (11)	0.0085 (9)	0.0017 (9)	−0.0028 (9)
C2	0.0384 (12)	0.0390 (12)	0.0450 (13)	0.0101 (9)	−0.0065 (10)	−0.0047 (10)
C3	0.0371 (12)	0.0416 (12)	0.0542 (14)	0.0138 (10)	−0.0017 (10)	−0.0087 (11)
C4	0.0356 (11)	0.0323 (11)	0.0463 (13)	0.0109 (9)	0.0009 (9)	−0.0079 (9)
C5	0.0390 (12)	0.0291 (10)	0.0338 (10)	0.0084 (8)	0.0017 (8)	−0.0009 (8)
C6	0.0429 (13)	0.0319 (11)	0.0358 (11)	0.0124 (9)	0.0061 (9)	−0.0006 (9)
C7	0.0654 (17)	0.0331 (11)	0.0380 (12)	0.0129 (11)	0.0035 (11)	−0.0028 (10)
C8	0.0437 (14)	0.0566 (16)	0.0452 (13)	0.0122 (12)	0.0048 (11)	0.0001 (12)
C9	0.0461 (14)	0.0491 (14)	0.0397 (12)	0.0094 (11)	−0.0028 (10)	−0.0008 (11)
C10	0.0552 (15)	0.0412 (13)	0.0337 (11)	0.0039 (11)	0.0039 (10)	−0.0050 (10)
C11	0.0413 (12)	0.0340 (11)	0.0300 (10)	0.0109 (9)	0.0050 (9)	−0.0012 (9)
C12	0.0601 (17)	0.0626 (18)	0.0518 (15)	0.0310 (14)	0.0171 (13)	0.0137 (14)
C13	0.0526 (17)	0.084 (2)	0.0628 (19)	0.0265 (16)	0.0152 (15)	0.0222 (18)
C14	0.0385 (14)	0.078 (2)	0.0502 (15)	0.0075 (13)	−0.0007 (11)	0.0121 (15)
C15	0.0504 (15)	0.0489 (14)	0.0374 (12)	−0.0006 (11)	0.0022 (10)	−0.0039 (11)
C16	0.0452 (13)	0.0404 (12)	0.0355 (11)	0.0112 (10)	0.0071 (9)	−0.0006 (10)
C17	0.092 (2)	0.0448 (15)	0.0506 (16)	0.0073 (15)	0.0014 (15)	−0.0109 (13)