| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cl1 | 0.02892 (13) | 0.04837 (17) | 0.02927 (14) | −0.01052 (10) | 0.00070 (10) | 0.00234 (10) |
| O1 | 0.0339 (4) | 0.0411 (4) | 0.0395 (4) | −0.0140 (3) | −0.0068 (3) | 0.0110 (3) |
| O2 | 0.0414 (4) | 0.0382 (4) | 0.0302 (4) | −0.0095 (3) | −0.0086 (3) | 0.0001 (3) |
| O3 | 0.0310 (4) | 0.0465 (5) | 0.0587 (6) | 0.0088 (3) | −0.0142 (4) | −0.0051 (4) |
| O4 | 0.0398 (4) | 0.0503 (5) | 0.0349 (4) | −0.0183 (4) | −0.0104 (3) | −0.0065 (3) |
| N1 | 0.0232 (4) | 0.0370 (4) | 0.0265 (4) | −0.0061 (3) | −0.0045 (3) | −0.0013 (3) |
| N2 | 0.0233 (4) | 0.0298 (4) | 0.0324 (4) | −0.0037 (3) | −0.0010 (3) | 0.0027 (3) |
| C1 | 0.0232 (4) | 0.0226 (4) | 0.0273 (4) | −0.0020 (3) | −0.0026 (3) | −0.0029 (3) |
| C2 | 0.0211 (4) | 0.0241 (4) | 0.0254 (4) | −0.0013 (3) | −0.0045 (3) | −0.0049 (3) |
| C3 | 0.0240 (4) | 0.0259 (4) | 0.0255 (4) | −0.0036 (3) | −0.0013 (3) | −0.0040 (3) |
| C4 | 0.0318 (5) | 0.0327 (5) | 0.0265 (4) | 0.0001 (4) | −0.0067 (4) | −0.0010 (4) |
| C5 | 0.0264 (5) | 0.0354 (5) | 0.0350 (5) | 0.0005 (4) | −0.0103 (4) | −0.0041 (4) |
| C6 | 0.0219 (4) | 0.0291 (5) | 0.0350 (5) | −0.0025 (3) | −0.0043 (4) | −0.0038 (4) |
| C7 | 0.0263 (4) | 0.0258 (4) | 0.0292 (5) | −0.0017 (3) | −0.0010 (4) | −0.0009 (3) |
| C8 | 0.0259 (5) | 0.0310 (5) | 0.0428 (6) | −0.0037 (4) | −0.0042 (4) | −0.0056 (4) |
| C9 | 0.0287 (5) | 0.0403 (6) | 0.0339 (5) | 0.0020 (4) | −0.0074 (4) | −0.0103 (4) |
| C10 | 0.0244 (4) | 0.0352 (5) | 0.0261 (4) | 0.0056 (4) | −0.0021 (4) | −0.0015 (4) |
| C11 | 0.0211 (4) | 0.0279 (4) | 0.0269 (4) | 0.0010 (3) | 0.0004 (3) | −0.0007 (3) |
| C12 | 0.0340 (5) | 0.0270 (5) | 0.0388 (6) | −0.0009 (4) | 0.0016 (4) | −0.0004 (4) |
| C13 | 0.0370 (6) | 0.0336 (5) | 0.0506 (7) | −0.0034 (4) | −0.0027 (5) | −0.0126 (5) |
| C14 | 0.0342 (5) | 0.0488 (7) | 0.0385 (6) | 0.0007 (5) | −0.0064 (5) | −0.0164 (5) |
| C15 | 0.0286 (5) | 0.0429 (6) | 0.0259 (5) | 0.0003 (4) | −0.0032 (4) | −0.0029 (4) |
| C16 | 0.0190 (4) | 0.0299 (5) | 0.0268 (4) | −0.0007 (3) | −0.0002 (3) | −0.0009 (3) |
| C17 | 0.0474 (7) | 0.0469 (7) | 0.0275 (5) | 0.0104 (5) | −0.0033 (5) | 0.0028 (4) |