| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cl1 | 0.03215 (17) | 0.03700 (18) | 0.02937 (16) | −0.01980 (13) | 0.00018 (11) | −0.00912 (12) |
| O1 | 0.0553 (6) | 0.0235 (4) | 0.0299 (4) | −0.0195 (4) | 0.0110 (4) | −0.0083 (3) |
| O2 | 0.0618 (7) | 0.0351 (5) | 0.0256 (4) | −0.0271 (5) | 0.0103 (4) | −0.0110 (4) |
| O3 | 0.0435 (5) | 0.0304 (5) | 0.0294 (5) | −0.0118 (4) | 0.0015 (4) | 0.0013 (4) |
| O4 | 0.0384 (5) | 0.0358 (5) | 0.0410 (5) | −0.0222 (4) | 0.0093 (4) | −0.0076 (4) |
| N1 | 0.0320 (5) | 0.0225 (4) | 0.0283 (5) | −0.0115 (4) | 0.0071 (4) | −0.0059 (4) |
| N2 | 0.0284 (5) | 0.0233 (4) | 0.0237 (4) | −0.0109 (4) | 0.0018 (4) | −0.0031 (4) |
| C1 | 0.0248 (5) | 0.0192 (4) | 0.0228 (5) | −0.0082 (4) | 0.0023 (4) | −0.0055 (4) |
| C2 | 0.0233 (5) | 0.0219 (5) | 0.0243 (5) | −0.0094 (4) | 0.0020 (4) | −0.0078 (4) |
| C3 | 0.0262 (5) | 0.0228 (5) | 0.0224 (5) | −0.0074 (4) | 0.0012 (4) | −0.0053 (4) |
| C4 | 0.0266 (5) | 0.0186 (5) | 0.0260 (5) | −0.0087 (4) | 0.0048 (4) | −0.0040 (4) |
| C5 | 0.0264 (5) | 0.0230 (5) | 0.0304 (6) | −0.0117 (4) | 0.0003 (4) | −0.0062 (4) |
| C6 | 0.0283 (5) | 0.0229 (5) | 0.0248 (5) | −0.0102 (4) | −0.0024 (4) | −0.0044 (4) |
| C7 | 0.0273 (5) | 0.0223 (5) | 0.0240 (5) | −0.0111 (4) | 0.0012 (4) | −0.0049 (4) |
| C8 | 0.0307 (6) | 0.0265 (5) | 0.0246 (5) | −0.0113 (4) | 0.0052 (4) | −0.0044 (4) |
| C9 | 0.0313 (6) | 0.0221 (5) | 0.0269 (5) | −0.0092 (4) | 0.0032 (4) | −0.0056 (4) |
| C10 | 0.0246 (5) | 0.0220 (5) | 0.0235 (5) | −0.0080 (4) | −0.0016 (4) | −0.0016 (4) |
| C11 | 0.0240 (5) | 0.0245 (5) | 0.0217 (5) | −0.0085 (4) | −0.0012 (4) | −0.0024 (4) |
| C12 | 0.0294 (6) | 0.0327 (6) | 0.0265 (5) | −0.0109 (5) | 0.0032 (4) | −0.0049 (5) |
| C13 | 0.0355 (7) | 0.0431 (7) | 0.0315 (6) | −0.0110 (6) | 0.0085 (5) | −0.0148 (5) |
| C14 | 0.0392 (7) | 0.0349 (6) | 0.0389 (7) | −0.0094 (5) | 0.0037 (5) | −0.0184 (5) |
| C15 | 0.0336 (6) | 0.0262 (5) | 0.0324 (6) | −0.0105 (5) | 0.0001 (5) | −0.0093 (5) |
| C16 | 0.0254 (5) | 0.0238 (5) | 0.0228 (5) | −0.0083 (4) | −0.0014 (4) | −0.0046 (4) |
| C17 | 0.0326 (6) | 0.0240 (5) | 0.0314 (6) | −0.0128 (5) | 0.0027 (5) | −0.0020 (4) |