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. 2021 Nov 17;197:113803. doi: 10.1016/j.bios.2021.113803

Fig. 1.

Fig. 1

Schematic diagram of the COVID-19 sensor fabrication process. (a) Synthesis of quasi-freestanding bilayer epitaxial graphene (EG) on silicon carbide (SiC). (b) Etching of the edge side on EG using CF4 plasma with a simple mask. (c) Deposition of Ti/Au metal stack as electrodes using an e-beam evaporator. (d) Immobilization of crosslinker and SARS-CoV-2 S1 spike protein on EG. (For interpretation of the references to color in this figure legend, the reader is referred to the Web version of this article.)