AFM	Atomic Force Microscopy
CMOS	Complementary Metal-Oxide-Semiconductor
DFT	Density Functional Theory
EDS	Energy-dispersive X-ray spectroscopy
FTIR	Fourier transform infrared (spectroscopy)
GGA	Generalized Gradient Approximation
GIXRD	Grazing Incidence X-ray Diffraction
LO	Longitudinal Optical (phonon)
PBE	Perdew-Burke-Ernzerhof (parametrization)
RMS	Root-Mean-Square
RPA	Random-Phase Approximation
SEM	Scanning Electron Microscopy
SERS	Surface-Enhanced Raman Spectroscopy
SIMS	Secondary Ion Mass Spectroscopy
TO	Transverse Optical (phonon)
UV	Ultra-violet (spectral range)
VASE	Variable-Angle Spectroscopic Ellipsometry
VIS	Visible (spectral range)