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. 2021 Nov 19;11(11):890. doi: 10.3390/membranes11110890

Figure 6.

Figure 6

Schematic flow of a complex UPW production system for microelectronics manufacturing. A typical hybrid membrane treatment plant is presented which involves a combination of RO-MBDI-UF to provide microelectronics grade UPW. Reprinted from [145], with permission from Elsevier.