Figure 5.

(a) Copper oxidation−assisted graphene delamination using ALD aluminum oxide to promote graphene peeling. Adapted under the terms of the Creative Commons Attribution 3.0 license from Ref. [58]. Copyright 2017 IOP Publishing Ltd. (b) Electrode setup for electrolytic removal of copper oxide passivating layer between graphene and the copper growth substrate. (c) Illustration of hypothesized chemical process for copper oxide dissolution. (d) Comparison of graphene transferred onto SiO_x using chemical etching of copper vs. non-etching substrate removal. (b–d) Adapted with permission from Ref. [61]. Copyright 2017 Royal Society of Chemistry.