Table 2.
Before | After | |||
---|---|---|---|---|
Surface roughness | ||||
1 µm × 1 µm | 10 µm × 10 µm | 1 µm × 1 µm | 10 µm × 10 µm | |
Rq, nm | 5.98 | 5.19 | 7.33 | 5.45 |
Rmax, nm | 27.12 | 54.84 | 29.76 | 34.29 |
Rmin, nm | −18.19 | −20.28 | −22.00 | −18.71 |
ADv, nm | 4.80 | 3.93 | 5.93 | 4.26 |
R sk | 0.28 | 0.93 | 0.38 | 0.63 |
R ku | 0.04 | 2.77 | −0.09 | 0.91 |
Atomic fraction, % | ||||
O 1s (530 eV) | 26.0 | 29.6 | ||
C 1s (285 eV) | 74.0 | 70.4 |