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X-ray images of silicon MEMS acceleration sensors (not to scale). Images were made with a Nikon HMXST 160 computed tomography scan (CT): (a) Bosch BMA 280 with a three-axis SMM sensor element and a package size of 2 × 2 × 0.95 mm3; (b) Safran Colibrys SI1003.A with a one-axis BMM sensor element in an LCC20 package with a size of 9 × 9 × 3.3 mm3.
