Table 1.
Commercial silicon MEMS acceleration sensors.
| Sensor | Analog Devices ADXL355 [34] | Bosch BMA280 [35] | TDK InvenSense MPU6500 [36] | Safran Colibrys SI1003 [37] |
|---|---|---|---|---|
| Technology | SMM | SMM | SMM | BMM |
| No. of axes | 3 | 3 | 3 1 | 1 |
| Measurement range | ±2 g | ±2 g | ±2 g | ±3 g |
| Noise | 22.5 µg/√Hz | 120 µg/√Hz | 300 µg/√Hz | 0.7 µg/√Hz |
| Bias temperature coefficient | ±0.15 mg/K | ±1.0 mg/K | ±0.6 mg/K | ±0.3 mg/K |
| Output | Digital | Digital | Digital | Analog (voltage) |
| Package | Ceramic LCC14 | Polymer LGA | Polymer QFN | Ceramic LCC20 |
| Package size | 6 × 5.6 × 2.2 mm3 | 2 × 2 × 0.95 mm3 | 3 × 3 × 0.9 mm3 | 8.9 × 8.9 × 3.2 mm3 |
| Evaluation board size 2 | 20 × 20 × 5 mm3 | 43 × 20 × 3 mm3 | 26 × 15 × 3 mm3 | |
| Cost: Purchase quantity 500 items | 35.95 €/Item [38] | 0.99 €/Item [39] | 3.63 €/Item [40] | 279.74 €/Item [41] |
1 The sensor is an integrated three-axis accelerometer and a three-axis gyroscope. In this work, only the accelerometer is used; 2 Without connector.