Table 3:
Effect of | BMO Area (mm2) |
BMO Aspect Ratio |
BMO Planarity (μm) |
ALC Median Depth (μm) |
ALC Visibility (%) |
||||||
---|---|---|---|---|---|---|---|---|---|---|---|
LOW | HIGH | LOW | HIGH | LOW | HIGH | LOW | HIGH | LOW | HIGH | ||
ICP | M1 | 0.017 | −0.009 | 0.002 | 0.217 | 1.736 | 1.857 | ||||
M2 | 0.013 | 0.007 | 0.003 | −0.155 | 1.821 | 0.818 | |||||
M3R | −0.008 | −0.002 | 0.078 | −0.170 | −0.927 | −1.173 | −1.114 | ||||
M3L | 0.025 | - | 0.002 | - | 0.527 | - | −5.650 | - | −1.435 | - | |
IOP | M1 | 0.009 | −0.004 | −0.001 | −0.002 | 0.159 | −0.693 | −1.497 | |||
M2 | −0.005 | −0.011 | −0.002 | 1.304 | |||||||
M3R | −0.010 | −0.002 | −0.003 | −0.003 | 0.290 | 1.087 | 0.314 | 0.529 | |||
M3L | - | - | - | - | - | - | - | - | - | - |