. 2021 Dec 2;9:759032. doi: 10.3389/fpubh.2021.759032
Copyright © 2021 Upadhyaya, Hasan, Abdel-Khalek, Hassan, Srivastava, Sharan, Islam, Saad and Vo.
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Figure 2.
(A) MOEMS as sensor, (B) MOEMS as actuator.