Table 1.
Performance comparison of selected sensors.
| Type | Configuration | Strategy | Mode | Detection limit | Sensitivity | References |
|---|---|---|---|---|---|---|
| Interferometer | MZI | Three core fibre for measurement of directional bending | TE | n.r.a | Bending sensitivity −15.35 nm/m−1 and 3.11 nm/m−1
Temperature sensitivitiy 0.043 nm/°C and 0.041 |
(3) |
| Diaphragm Integrated MZI | Analysing to light intensity with diaphragm deflection | TE | n.r.a | −0.2 pm/Pa | (5) | |
| MZI | Lab on chip biosensor with MZI Phase modulator | <0.05 L/min), a high resolution (0.005 L/min), and a fast response time (12 millis | n.r.a | (6) | ||
| MZI | Methylcellulose coated MZI for humidity sensing | TE | 45–85% RH | 0.094 dB/%RH | (10) | |
| MZI | MZI Ultrasound Sensor | TE | 0.38 mPa/Hz1/2 | 0.62 mV/Pa | (11) | |
| MZI | MZI temperature sensor | TE | n.r.a | 21.2 nm/C | (12) | |
| MZI | MZI Respiratory monitoring | TE | n.r.a | Sensitivity upto 8.53 dB/m-1 | (14) | |
| Photonic MEMS /Microcantilever | Photonic Microcantilever | Photonic Microcantilever for chemical analysis | TE | 0.6 mum and 0.0098% in water and 0.812 mum and 0.0144% in air, | n.r.a | (25) |
| Optical MEMS microcantilever | Various shape microcantilever integration with Optical MEMS | NA | 81.55 μg−28.39 mg (polyimide material –Triangular cantilever. 50.97 μg−23.996 mg (Parylene material | n.r.a | (30) | |
| MOEMS | MOEMS nanomechanical sensor | TE | 0–0.10 MPa;(One end fixed) 0–400 MPa; (both end fixed) |
68.296 nm/MPa (fixed one end) 0.134 nm/MPa (Both end fixed) |
(35) | |
| Photonic crystal fibre | Hybrid dual-core photonic crystal fibre | TE | 0 to 1,000 Mpa | −11.6 pm/Mpa. | (37) | |
| Photonic crystal | Pressure and Temperature sensor with hexagonal resonator | TE | 0.04 to 6 GPa | n.r.a | (36) | |
| Microcantilever Hexagonal ring resonator | hexagonal ring and micromachined cantilever tips on 2D silicon photonic crystal | TE | 1–10 MPa, 10–100 MPa, 1-MPa −20MPa, 20 MPa−10 GPa | n.r.a | (38) | |
| Fibre Bragg Grating | FBG sensor for biomedical | Polymer optical fibre Bragg grating analysis | TE | n.r.a | 54.2 pm %RH−1 ± 0.14%RH | (39) |
| FBG for biomedical | Integrated nano-optomechanical displacement sensor | Displacement imprecision of only 45 FM/Hz1/2 as well as a large dynamic range (>30 nm). | n.r.a | (43) | ||
| Fibre pressure sensor | Multi-Point Optical Fibre | TE | n.r.a | −0.672 rad/MPa | (44) | |
| CMOS based Nanomechanical sensor | CMOS MEMS-based nanomechanical sensor for molecule detection | NA | 4.06 ± 0.15 μg/mL | n.r.a | (45) | |
| FBG force sensor | FBG force sensor for tissue palpation | TE | 0–5 N | n.r.a | (48) |
a
Not reported.