Table 2.
Key applications of Optical MEMS in biomedical.
| Medical area | Type of modulation | Place | Monitoring strategy | Technical feature of sensor | References |
|---|---|---|---|---|---|
| Dental | Optical Coherence Tomography | In vitro | Carries, cracked tooth | B-mode PAT is good at providing microstructural properties. S – Mode PAT provides a proper imaging system of the crack lesion. |
(53) |
| Fibre Bragg Grating | In vitro | Force monitoring in maxilla model | Force range detected 0–20 N | (51) | |
| Intervertebral disc | Fibre Bragg Grating | In vitro | Pressure monitoring in intervertebral disc | Pressure range between 0 and 500 N | (59) |
| Lumbar motion | Fibre Bragg grating | In vitro | Lumbar stretch monitoring | Rotation angle upto 0–35°C | (60) |
| Low back motion | Optical fibre | In vitro | Low back movements monitoring | Sensitivity 0.20 nm·mε−1 | (61) |
| Join angle | Fibre Bragg grating | In vitro | Goniometer | Joint angles in the range of 0–200° with a resolution of 0.06° | (65) |
| Insole pressure | Optical fibre | In vitro | Insole force monitoring | Sensitivity 11.06 pm/N | (66) |
| Communication assistance | Optical fibre | In vitro | Using breath pattern analyser | Average accuracy of the device obtained 90% | (67) |
| Pulse wave and respiratory | MEMS + Optical | In vitro | Pulse pressure monitoring | Minimum detectable pressure 0.01 Pa | (74) |
| Microfluidic | Photonic crystal | In vitro | Fluid flow sensing | Sensitivity 836 nm/RIU | (87) |
| Intraocular | Optical MEMS | In vitro | Glaucoma Monitoring | accuracy of 0.29 mm | (90) |
| Oximetry | Optical Fibre | In vitro | Oxygen monitoring by the contact force | Detection limit of 5-15KPa | (96) |
| Pulse wave monitoring | Optical fibre and FBG | In vitro | Pulse wave signals | POF-FBG APG correlation is distributed from 0.54 to 0.72 | (82) |
| Urodynamic measurement | Optical fibre pressure sensor | In vitro | Urodynamic Pressure | 0.1 cm H2O (~10 Pa), a stability better than 1 cm H2O/h | (98) |