The sensitivity, quality factor, and figure of merit for the proposed sensor when td = 1.20 μm.
| θ 0 (°) | n = 1.3483 | n = 1.35012 | n = 1.3525 | n = 1.35692 | n = 1.36541 |
|---|---|---|---|---|---|
| Sensitivity (nm RIU −1 ) | |||||
| 0 | 98.0 | 98.9 | 100.2 | 102.5 | 106.7 |
| 10 | 103.2 | 104.2 | 105.4 | 107.7 | 111.9 |
| 20 | 118.9 | 119.8 | 121.0 | 123.3 | 127.3 |
| 30 | 144.5 | 145.4 | 146.6 | 148.7 | 152.7 |
| 45 | 21 | 22.7 | 24.9 | 29.0 | 36.6 |
| 60 | 136.3 | 137.9 | 140.0 | 143.9 | 150.9 |
| Quality factor | |||||
| 0 | 9645.0 | 9653.7 | 9665.0 | 8302.3 | 8336.7 |
| 10 | 11 970.7 | 9585.3 | 11 995.9 | 12 022.7 | 9658.7 |
| 20 | 15 625.3 | 15 640.7 | 15 660.3 | 11 773.0 | 11 825.8 |
| 30 | 23 415.9 | 23 440.9 | 23 473.4 | 23 533.9 | 23 650.4 |
| 45 | 74 159.6 | 49 502.7 | 49 585.4 | 74 608.6 | 75 050.6 |
| 60 | 51 573.9 | 51 654.4 | 51 759.4 | 51 953.4 | 34 881.6 |
| Figure of merit | |||||
| 0 | 1632.7 | 1649.0 | 1670.0 | 1464.1 | 1524.3 |
| 10 | 2149.7 | 1736.0 | 2195.7 | 2243.5 | 1864.2 |
| 20 | 3301.8 | 3328.4 | 3361.7 | 2567.8 | 2652.5 |
| 30 | 6230.3 | 6269.3 | 6319.1 | 6410.4 | 6580.3 |
| 45 | 3085.0 | 2225.9 | 2445.4 | 4268.5 | 5378.9 |
| 60 | 13 294.6 | 13 455.4 | 13 662.4 | 14 036.8 | 9813.6 |