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. 2021 Dec 9;6(50):34429–34437. doi: 10.1021/acsomega.1c04532

Table 1. Thickness and RMS of WS2 Films.

number of ALD cycles 20 30 40 50
WS2 film thickness (nm) 1.9 2.8 3.7 4.7
RMS (nm) 0.28 0.23 0.49 0.35