Table 2. Contact Resistance and Contact Resistivity of the Investigated Structures.
| WS2 film thickness (nm) | 1.9 | 2.8 | 3.7 | 4.7 |
| Rc (Ω) | 1 × 109 | 2.3 × 106 | 3.0 × 106 | 3.8 × 107 |
| ρc (Ω·cm2) | 1.7 × 102 | 4.2 | 6.1 | 8.7 |
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