Table 1.
Sample | Gas Feed | (slm) | P (W) | v (mm/s) | Passes | d (mm) |
---|---|---|---|---|---|---|
Ar-f | Ar | 67 | 500 | 100 | 2 | 10 |
ArO-f | Ar/O | 67/1.0 | 500 | 100 | 2 | 10 |
ArN-f | Ar/N | 67/1.5 | 500 | 100 | 2 | 10 |
ArN- | Ar/N | 100/3.5 | 600 | 100 | 2 | 10 |
Ar-s | Ar | 67 | 500 | 22 | 10 | 5 |
ArO-s | Ar/O | 67/1.0 | 500 | 22 | 10 | 5 |
ArN-s | Ar/N | 67/1.2 | 400 | 22 | 10 | 5 |