Table 2.
WCA | C | O | N | Roughness | Tensile Str. | |
---|---|---|---|---|---|---|
Sample | () | (at.%) | (at.%) | (at.%) | Diff. (nm) | (MPa) |
Ref | 99 ± 1 | 100 | 1.4 ± 0.1 | |||
Ar-f | 74 ± 2 | 89 | 10 | 0.5 | ± 1 | 3.5 ± 0.3 |
ArO-f | 76 ± 1 | 88 | 11 | 0.6 | ± 1 | 4.8 ± 0.3 |
ArN-f | 67 ± 1 | 88 | 11 | 1.4 | ± 1 | 4.3 ± 0.3 |
ArN- | 67 ± 1 | 89 | 10 | 1.6 | 2 ± 2 | 6.3 ± 0.4 |
Ar-s | 36 ± 4 | 70 | 27 | 3 | ± 2 | 3.8 ± 0.2 |
ArO-s | 58 ± 2 | 77 | 22 | 1 | ± 1 | - |
ArN-s | 59 ± 3 | 72 | 20 | 8 | ± 1 | 4.5 ± 0.2 |